Wet Bench

• Developing Process
• Etching Process
• Stripping Process
• Cleaning Process
• Mask Cleaner

2"-8" Wafer

Wet Bench or Wet station

Auto / Semi-Auto / Manual

Build-to-order available

• Class 100 or 1000
• CIM Connect
• Chemical Supply System
• CO2 / IR
• PLC / PC Base / PAC
• Datalogic
• Temperature Measurement Data Acquisition System

• Use quality pipe and valve componen
• Use PAC for electronic controller
• Robotic horizontal and vertical stroke for high accuracy, stability and positioning
• Quarantine zone for both acidic gas and electrical substance
• Flexible disposition scheme for QDR
• Modularized pipeline installment allows swift and convenient maintenance
• Product design is highly adaptable to fit in customized environment according to the actual needs